EUV solutions

"Guiding Light to the Future"

Leading the Semiconductor Future

Company
Haba Lab Co., Ltd. is an innovative company specializing in semiconductor Blue-X or EUV light source technology.It was certified and established as a research laboratory company within the Pohang Accelerator Research Center in the Pohang Special Zone.We are leading the future of the semiconductor industry through research and development of cutting-edge Blue-X or EUV light sources and applications.

Products & Service

EUVL or Blue-X Light Sources

We provide industry leading EUVL light sources to optimize semiconductor lithography processes.

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EUVL Materials and Components

We enhance the efficiency and quality of semiconductor manufacturing through next-generation EUVL materials and components

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Evaluation Equipment Utilizing EUVL or Blue-X Light Source

We provide EUVL pellicle transmittance, nanopatterning evaluation equipment, and analysis services for EUVL optical components and materials. ● EUVL pellicle transmittance measurement equipment ● EUVL mask reflectivity measurement equipment ● Hydrogen, high-temperature, and lifetime evaluation of EUVL optical components and materials etc.

Vacuum components & ion pump

EUV light source technology requires an Ultra-High Vacuum (UHV) system. Therefore, in addition to our light source technology, we are capable of ordering and manufacturing UHV components, supplying ion pumps, and providing professional support and assistance for overall vacuum systems.

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Key Competitiveness

1

Core Technology and Infrastructure

World-class EUVL or The next generation Blue-X after EUVL light source technology, Holding numerous related patents, Forming diverse networks through beam line operation and joint research

2

Technological Extensibility

Light source itself is a product, Utilized in various versions of measurement devices, Applied to the development of EUVL-related materials and components

3

Capabilities of the Company

Extensive research achievements accumulated in the field of EUV lithography (EUVL), Extensive experience and know-how accumulated in the EUVL technology domain.

4

Growth Potential

Securing core technologies and leading EUVL or Blue-X technology

Technical Support

 

As an expert in the field of semiconductor EUV light sources and UHV (Ultra-High Vacuum), I address and resolve a variety of customer requests and issues.

     
Habarlab Co., Ltd. Technology Team

CONTACT US

  • 77, Cheongam-ro, Nam-gu, Pohang-si, Gyeongsangbuk-do, Republic of Korea
  • Room 506, Nano Convergence Technology Institute, Pohang University of Science and Technology
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Technical Documentation

Catalog

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Company IR Information

Company IR

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