EUVL or Blue-X Light Sources

EUVL or Blue-X Light Sources

1-1. EUV Light Source

  • Wavelength Accuracy: < 5% (based on 13.5 nm)
  • Resolution: E/ΔE > 20
  • Photon Flux: > 10^8 photons per second
  • Temporal Stability: < 3% variation over time

1-2. Blue-X Light Source

  • Wavelength Accuracy: < 5% (based on 6.7 nm)
  • Resolution: E/ΔE > 20
  • Photon Flux: > 10^8 photons per second
  • Temporal Stability: < 3% variation over time

🌟 Stable Light Source is Key

In pellicle transmittance measurement devices, the stability of the light source is of utmost importance. Fluctuations can compromise measurement accuracy.


🔑 Our Light Source Offers Superior Stability

Our light source guarantees high stability, providing precise, reliable, and repeatable measurements consistently over time.


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While many high-end light sources are expensive and difficult to maintain, ours is both cost-effective and low-maintenance, reducing both operational and downtime costs.