World-class EUVL or The next generation Blue-X after EUVL light source technology, Holding numerous related patents, Forming diverse networks through beam line operation and joint research
Light source itself is a product, Utilized in various versions of measurement devices, Applied to the development of EUVL-related materials and components
Extensive research achievements accumulated in the field of EUV lithography (EUVL), Extensive experience and know-how accumulated in the EUVL technology domain.
Securing core technologies and leading EUVL or Blue-X technology